A thermal bimorph micromirror with large bi-directional and vertical actuation

This paper reports a novel large vertical displacement (LVD) microactuator that can generate large piston motion and bi-directional scanning at low driving voltage. A LVD micromirror device has been fabricated by using a unique deep reactive ion etch (DRIE) post-CMOS micromachining process that simultaneously provides thin-film and single-crystal silicon microstructures. The bimorph actuation structure is composed of aluminum and silicon dioxide with an embedded polysilicon thermal resistor. With a size of only 0.7 mm× 0.32 mm, the LVD micromirror demonstrated a vertical displacement of 0.2 mm at 6 V dc. This device can also be used to perform bi-directional rotational scanning through the use of two bimorph actuators. The micromirror rotates over ±15◦ at less than 6 V dc, and over ±43◦ (i.e., >170◦ optical s ©